Methods of making micro-sized machines, or microelectromechanical systems (MEMS) are already established. Fully functional pumps, rotors, sensors and levers exist at the micro scale. Moving from the micro to the nano scale NEMS devices will present new engineering challenges. However, as with microfluidics, the integration of existing MEMS technology with biological systems can yield a new class of machines, “BioMEMS,” that can perform functions (such as capture of foreign particles or delivery of drugs to specific locations) at the nanoscale or on nanoparticles. Biochips that are smaller than a postage stamp exist today. These biochips contain sealed channels and wells, electrodes for detection, connectors and fluidic input/output ports. BioMEMS can provide the interface between the macro and nano-worlds, as well as the interface between the biological and electromechanical worlds of technology.