Vapor phase deposition has been extensively used for the fabrication of the ZnO nanostructures. Here source materials are evaporated under vacuum, then transported and condensed onto the substrates, which are placed in a lower temperature zone. Well aligned ZnO nanorod arrays can be produced by proper control of the supersaturated pressure. Vapor-solid-liquid (VSL) process is one of the well known vapor phase techniques to fabricate ZnO nanorod array. In this process metal catalysts are introduced into the synthesis process to direct the crystal growth in a specific direction. Au, Cu, Ni and Sn are commonly used as typical catalysts. This synthesis method is simplebut involves relatively high growth temperature.