In this method a liquid precursor is atomized and injected into the high temperature plasma flame by which evaporation of the solvent happens. The plasma synthesized particles are then collected either as a deposit on a substrate or as powder on the electrostatic precipitator by condensation of the precursor materials and initiation of chemical reactions. Nucleation and growth of the grains mat then occur; followed by formation of dense particles/crystals, agglomerates or aggregates whose characteristics depend on properties of the precursors, geometry of the atomizer and atomizing and spray process variables.